MBE 6000 – Multi 3’’, 4’’, 6’’, 200mm production system
Presentation
At the heart of every successful high volume merchant or in – house epi operation worldwide is Riber’s multi 4″ / 6″ MBE 6000. It is the MBE benchmark for high throughput & reproducibility. Campaign lengths often in excess of one year are testament to the reactors stability & reliability. And there is no more powerful endorsement than the repeat orders placed by both new and long standing customers of Riber.
There are many fabs equipped with 2 – 8 MBE 6000’s running side by side 24 / 7.
Initially, systems were used mostly to manufacture high volumes of microwave device material, principally P-HEMT wafers. But increasingly, over the past 2 – 3 years, the full potential of the MBE 6000 is beginning to be revealed as it is being readily applied over a much wider range of application areas.
So much so, that it is now firmly established, not just in the microwave arena, but also as the mass production tool of choice for As, P or Sb containing optoelectronic materials. It’s an extraordinary product – ask our customers; they’re the leading semiconductor companies in the world.